FOREIGN SUBSTANCE DETECTION METHOD

PROBLEM TO BE SOLVED: To improve the sensitivity for detecting a foreign substance contained in a to-be-measured object. SOLUTION: A foreign substance detection method has: the process for inputting a signal to a cavity resonator at a frequency (f1) different from a resonance frequency (f0) of the c...

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Bibliographische Detailangaben
Hauptverfasser: IKEDA MASATO, MASE ATSUSHI, YABIKU NAOYA
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To improve the sensitivity for detecting a foreign substance contained in a to-be-measured object. SOLUTION: A foreign substance detection method has: the process for inputting a signal to a cavity resonator at a frequency (f1) different from a resonance frequency (f0) of the cavity resonator; and the process for detecting the foreign substance contained in the sheet-like to-be-measured object located within the cavity resonator on the basis of a change (400) in the signal passing through and output from the cavity resonator. COPYRIGHT: (C)2011,JPO&INPIT