SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To precisely measure low resistance in a semiconductor device without changing socket structure at the side of an inspection unit. SOLUTION: Switch elements 13, 14 are provided between both the ends of a resistor 1 and external terminals 7, 8 for internal circuits 9, 10, and sw...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: SHIROKOSHI HIDEKI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To precisely measure low resistance in a semiconductor device without changing socket structure at the side of an inspection unit. SOLUTION: Switch elements 13, 14 are provided between both the ends of a resistor 1 and external terminals 7, 8 for internal circuits 9, 10, and switch elements 15, 16 are provided between the internal circuits 9, 10 and the external terminals 7, 8. When measuring the value of resistance of the resistor 1, a switch selection section 17 turns on the switch elements 13, 14 and turns off the switch elements 15, 16, thus electrically connecting the four external terminals 3, 4, 7, 8 to the resistor 1 for enabling four-terminal measurement. COPYRIGHT: (C)2011,JPO&INPIT