CHARGED PARTICLE DETECTION SYSTEM AND METHOD

PROBLEM TO BE SOLVED: To reduce the number of detectors, to release a space, and to reduce manufacturing cost. SOLUTION: A charged particle detection system 100 selectively detects charged particles generated by the operation of a charged particle beam column 102 radiating a specimen 110. A proximal grid 130 is selectively and electrically biased, and controllably directs the charged particles so that, when secondary charged particles are selected from the charged particles, the selected secondary charged particles are forced to be attracted to the proximal grid 130 and unselected secondary charged particles are repelled therefrom. A distal grid 132 spaced apart from the proximal grid and separated therefrom by a gap is selectively and electrically biased, and when the secondary charged particles and/or tertiary charged particles are selected from the charged particles, the selected charged particles are attracted to the distal grid and unselected tertiary charged particles are repelled therefrom. A charged particle detector 124 detects the selected secondary charged particles and tertiary charged particles by the impingement of them. COPYRIGHT: (C)2011,JPO&INPIT