INSPECTION SYSTEM AND METHOD WITH MULTI-IMAGE PHASE SHIFT ANALYSIS

PROBLEM TO BE SOLVED: To provide a newly improved inspection system and method for inspecting edge breaking sections. SOLUTION: The inspection system (10) includes a light source (20), a diffraction grating (23), a phase shift unit, an imager (30), and a processor (11). The light source (20) is comp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ISAACS RALPH GERALD, ZHENG JIANMING, ROSS JOSEPH BENJAMIN, SONG GUIJU, ABRAMOVICH GIL, HARDING KEVIN GEORGE
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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