INSPECTION SYSTEM AND METHOD WITH MULTI-IMAGE PHASE SHIFT ANALYSIS

PROBLEM TO BE SOLVED: To provide a newly improved inspection system and method for inspecting edge breaking sections. SOLUTION: The inspection system (10) includes a light source (20), a diffraction grating (23), a phase shift unit, an imager (30), and a processor (11). The light source (20) is composed to give off light. The diffraction grating (23) is in route of generated light and is composed to form diffraction grating imageries after light passes through. The phase shift unit is composed to form a plurality of phase shift patterns of diffraction grating image, which is reflected on the surface of an object (16) to form a plurality of projection phase shift patterns. The imager (30) is composed to obtain the image data of projection phase shift pattern. The processor (11) is composed to reproduce the surface of the object from the imagery data. The inspection method is also disclosed. COPYRIGHT: (C)2011,JPO&INPIT