MACHINING DEVICE

PROBLEM TO BE SOLVED: To provide a machining device capable of quickly performing, for an object to be machined, the operations from machining to inspection. SOLUTION: When finishing the machining from 11 area to 1N area, a machining head is moved to a reference position and at the same time, a substrate P is moved to a (-X) direction at a prescribed distance t1 so that the center of 2N area falls on the position facing the machining head moved to the reference position. Thereby, the machining of 2N area is performed in parallel with the inspection of 1N area. Then, the machining head is moved again to the reference position and at the same time, the substrate P is moved to a (-Y) direction at a prescribed distance t2 so that the center of 2(N-1) area falls on the position facing the machining head moved to the reference position. Thus, the machining of 2(N-1) area is performed in parallel with the inspection of 1(N-1) area. Since the machining and inspection of two areas adjacent to the X direction are performed in parallel, the operation from machining to inspection for the substrate P can be quickly performed. COPYRIGHT: (C)2011,JPO&INPIT