TRANSPARENT BASE WITH TRANSPARENT CONDUCTIVE FILM, METHOD OF MANUFACTURING SAME, AND PHOTOELECTRIC CONVERTER COMPRISING SUCH BASE
PROBLEM TO BE SOLVED: To provide a transparent substrate with a transparent conductive film that is thin but that has a surface with ruggedness with large height. SOLUTION: A transparent substrate with a transparent conductive film includes a transparent substrate, and a transparent conductive film...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a transparent substrate with a transparent conductive film that is thin but that has a surface with ruggedness with large height. SOLUTION: A transparent substrate with a transparent conductive film includes a transparent substrate, and a transparent conductive film that is formed on the transparent substrate and that contains crystalline metal oxide as its main component, wherein the transparent conductive film has a thickness range of 300 to 750 nm, and the transparent substrate with a transparent conductive film has a haze ratio of at least 15%; and with respect to peak areas, corresponding to orientation planes of the crystalline oxide calculated from an X-ray diffraction pattern, when the peak area of a (110) plane is set at 100, all the orientation planes other than the plane have each a peak area that os 80 or smaller. COPYRIGHT: (C)2011,JPO&INPIT |
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