CLEANING SHEET, CONVEYING MEMBER WITH CLEANING FUNCTION, METHOD OF CLEANING BASE TREATMENT DEVICE AND BASE TREATMENT DEVICE

PROBLEM TO BE SOLVED: To provide a cleaning sheet which shows excellent foreign substance removal function and conveying function, and besides, especially a performance to efficiently remove a foreign substance having a specified particle diameter, as well as a conveying member with cleaning functio...

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Bibliographische Detailangaben
1. Verfasser:	UENDA DAISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a cleaning sheet which shows excellent foreign substance removal function and conveying function, and besides, especially a performance to efficiently remove a foreign substance having a specified particle diameter, as well as a conveying member with cleaning function. SOLUTION: This cleaning sheet 100 has a cleaning layer 10 substantially without self-adhesive power. In addition, the cleaning layer has an uneven shape part with a surface roughness Ra of not less than 0.10 μm, and a 180° peeling self-adhesive power stipulated by JIS-Z-0237 of less than 0.20 N/10 mm, to the mirror surface of a silicon wafer. The conveying member with cleaning function has a conveying member and a cleaning layer which is arranged at least, on one surface of the conveying member. COPYRIGHT: (C)2011,JPO&INPIT