METHOD OF MANUFACTURING QUANTUM WELL STRUCTURE, SEMICONDUCTOR LASER, AND COMPOUND SEMICONDUCTOR LAYER, AND METHOD OF CONTROLLING MBE (MOLECULAR BEAM EPITAXY) DEVICE
PROBLEM TO BE SOLVED: To provide a method of manufacturing a quantum well structure having a well layer with high photoluminescence intensity, a semiconductor laser, and a compound semiconductor layer with the high photoluminescence intensity, and to provide a method of controlling a molecular beam...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method of manufacturing a quantum well structure having a well layer with high photoluminescence intensity, a semiconductor laser, and a compound semiconductor layer with the high photoluminescence intensity, and to provide a method of controlling a molecular beam epitaxy device using the photoluminescence intensity of the compound semiconductor layer. SOLUTION: The quantum well structure has the well layer consisting of InGaAs or GaInNAs, wherein an oxygen concentration of the well layer is no more than 5×1016atoms/cm3. COPYRIGHT: (C)2011,JPO&INPIT |
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