ELECTRON BEAM DEVICE HAVING LINE ANALYSIS FUNCTION

PROBLEM TO BE SOLVED: To provide a method capable of easily setting analysis points at arbitrary intervals and arbitrary points on the same line segment when performing line analysis by irradiating an electron beam to a sample. SOLUTION: A line analysis position on an HAADF image is specified by usi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ISHIKAWA TAKAKI, INAMI WATARU, YASUHARA SATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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