PELLICLE

PELLICLE

PROBLEM TO BE SOLVED: To provide a pellicle which releases little amount of acid and ammonium ion, and exhibits superior detectability with a pellicle detection sensor. SOLUTION: The pellicle is provided that includes an aluminum pellicle frame having an alumite layer on its entire surface; and a pe...

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Bibliographische Detailangaben
1. Verfasser: SHIRASAKI SUSUMU
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a pellicle which releases little amount of acid and ammonium ion, and exhibits superior detectability with a pellicle detection sensor. SOLUTION: The pellicle is provided that includes an aluminum pellicle frame having an alumite layer on its entire surface; and a pellicle film stretched over and affixed to the pellicle frame, the anodized layer having a thickness of 4 to 8 μm. Preferably, the alumite layer is an alumite layer comprising a black dye. Furthermore, the pellicle is suitably used for a pellicle for lithography. COPYRIGHT: (C)2011,JPO&INPIT