SURFACE ANALYSIS METHOD

PROBLEM TO BE SOLVED: To alleviate an electrostatic charge of a specimen without being influenced by a crack or the like on the surface of the specimen, and to analyze the surface. SOLUTION: The surface analysis method includes steps of: forming a layer of a non-solidified conductive-sample fixing m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TANJI NORIBUMI, HABE TAICHI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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