SURFACE ANALYSIS METHOD

PROBLEM TO BE SOLVED: To alleviate an electrostatic charge of a specimen without being influenced by a crack or the like on the surface of the specimen, and to analyze the surface. SOLUTION: The surface analysis method includes steps of: forming a layer of a non-solidified conductive-sample fixing m...

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Bibliographische Detailangaben
Hauptverfasser:	TANJI NORIBUMI, HABE TAICHI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To alleviate an electrostatic charge of a specimen without being influenced by a crack or the like on the surface of the specimen, and to analyze the surface. SOLUTION: The surface analysis method includes steps of: forming a layer of a non-solidified conductive-sample fixing material 12 which is a non-conductive matrix containing a conductive filler; setting a sample 13 on the layer so that at least part of the sample is buried and at least part of the surface of the sample is exposed; fixing the sample 13 by solidifying the non-solidified conductive-sample fixing material 12; and applying an analysis beam to the exposed surface of the sample 13 fixed to the non-solidified conductive-sample fixing material 12. COPYRIGHT: (C)2011,JPO&INPIT