SURFACE ANALYSIS METHOD

PROBLEM TO BE SOLVED: To alleviate an electrostatic charge of a specimen without being influenced by a crack or the like on the surface of the specimen, and to analyze the surface. SOLUTION: The surface analysis method includes steps of: forming a layer of a non-solidified conductive-sample fixing m...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TANJI NORIBUMI, HABE TAICHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator TANJI NORIBUMI
HABE TAICHI
description PROBLEM TO BE SOLVED: To alleviate an electrostatic charge of a specimen without being influenced by a crack or the like on the surface of the specimen, and to analyze the surface. SOLUTION: The surface analysis method includes steps of: forming a layer of a non-solidified conductive-sample fixing material 12 which is a non-conductive matrix containing a conductive filler; setting a sample 13 on the layer so that at least part of the sample is buried and at least part of the surface of the sample is exposed; fixing the sample 13 by solidifying the non-solidified conductive-sample fixing material 12; and applying an analysis beam to the exposed surface of the sample 13 fixed to the non-solidified conductive-sample fixing material 12. COPYRIGHT: (C)2011,JPO&INPIT
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2010249694A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2010249694A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2010249694A3</originalsourceid><addsrcrecordid>eNrjZBAPDg1yc3R2VXD0c_SJDPYMVvB1DfHwd-FhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGhgZGJpZmliaOxkQpAgATvB_q</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SURFACE ANALYSIS METHOD</title><source>esp@cenet</source><creator>TANJI NORIBUMI ; HABE TAICHI</creator><creatorcontrib>TANJI NORIBUMI ; HABE TAICHI</creatorcontrib><description>PROBLEM TO BE SOLVED: To alleviate an electrostatic charge of a specimen without being influenced by a crack or the like on the surface of the specimen, and to analyze the surface. SOLUTION: The surface analysis method includes steps of: forming a layer of a non-solidified conductive-sample fixing material 12 which is a non-conductive matrix containing a conductive filler; setting a sample 13 on the layer so that at least part of the sample is buried and at least part of the surface of the sample is exposed; fixing the sample 13 by solidifying the non-solidified conductive-sample fixing material 12; and applying an analysis beam to the exposed surface of the sample 13 fixed to the non-solidified conductive-sample fixing material 12. COPYRIGHT: (C)2011,JPO&amp;INPIT</description><language>eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2010</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20101104&amp;DB=EPODOC&amp;CC=JP&amp;NR=2010249694A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20101104&amp;DB=EPODOC&amp;CC=JP&amp;NR=2010249694A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>TANJI NORIBUMI</creatorcontrib><creatorcontrib>HABE TAICHI</creatorcontrib><title>SURFACE ANALYSIS METHOD</title><description>PROBLEM TO BE SOLVED: To alleviate an electrostatic charge of a specimen without being influenced by a crack or the like on the surface of the specimen, and to analyze the surface. SOLUTION: The surface analysis method includes steps of: forming a layer of a non-solidified conductive-sample fixing material 12 which is a non-conductive matrix containing a conductive filler; setting a sample 13 on the layer so that at least part of the sample is buried and at least part of the surface of the sample is exposed; fixing the sample 13 by solidifying the non-solidified conductive-sample fixing material 12; and applying an analysis beam to the exposed surface of the sample 13 fixed to the non-solidified conductive-sample fixing material 12. COPYRIGHT: (C)2011,JPO&amp;INPIT</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2010</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBAPDg1yc3R2VXD0c_SJDPYMVvB1DfHwd-FhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGhgZGJpZmliaOxkQpAgATvB_q</recordid><startdate>20101104</startdate><enddate>20101104</enddate><creator>TANJI NORIBUMI</creator><creator>HABE TAICHI</creator><scope>EVB</scope></search><sort><creationdate>20101104</creationdate><title>SURFACE ANALYSIS METHOD</title><author>TANJI NORIBUMI ; HABE TAICHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2010249694A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2010</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>TANJI NORIBUMI</creatorcontrib><creatorcontrib>HABE TAICHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>TANJI NORIBUMI</au><au>HABE TAICHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SURFACE ANALYSIS METHOD</title><date>2010-11-04</date><risdate>2010</risdate><abstract>PROBLEM TO BE SOLVED: To alleviate an electrostatic charge of a specimen without being influenced by a crack or the like on the surface of the specimen, and to analyze the surface. SOLUTION: The surface analysis method includes steps of: forming a layer of a non-solidified conductive-sample fixing material 12 which is a non-conductive matrix containing a conductive filler; setting a sample 13 on the layer so that at least part of the sample is buried and at least part of the surface of the sample is exposed; fixing the sample 13 by solidifying the non-solidified conductive-sample fixing material 12; and applying an analysis beam to the exposed surface of the sample 13 fixed to the non-solidified conductive-sample fixing material 12. COPYRIGHT: (C)2011,JPO&amp;INPIT</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_JP2010249694A
source esp@cenet
subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title SURFACE ANALYSIS METHOD
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-27T16%3A45%3A18IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=TANJI%20NORIBUMI&rft.date=2010-11-04&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2010249694A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true