HARDENED RESIN SUBSTRATE, WINDOW GLASS ALTERNATIVE, MIXED HARD FILM FORMING METHOD AND FILM FORMING APPARATUS

PROBLEM TO BE SOLVED: To provide a laminated film capable of improving the wear resistance of the transparent resin substrate or a technology for forming a mixed hard film. SOLUTION: The code 1 of the Fig.1 is a mixed hard film forming apparatus for forming the mixed hard film from which the window glass alternative is formed and in the vapor deposition chamber 12, a first vapor deposition source 21 comprising TiO2and a second vapor deposition source 22 comprising SiO2are arranged right below the travelling direction of a material to be film-formed with a fixed distance. The mixed hard film is formed using the mixed hard film forming apparatus 1 by introducing gaseous oxygen into the vapor deposition chamber12, forming a region ranging from a position where TiO2is more than SiO2to a position where SiO2 is increased through a position where a TiO2is gradually decreased, while heating and vaporizing the first vapor deposition source 21 comprising TiO2and the second vapor deposition source 22 comprising SiO2and passing the transparent resin substrate through the regions. COPYRIGHT: (C)2011,JPO&INPIT