FINE STRUCTURE TRANSFER STAMPER AND FINE STRUCTURE TRANSFER DEVICE

PROBLEM TO BE SOLVED: To provide a fine structure transfer stamper which can form a simply constituted and uniform pattern forming layer and hardly breaks even when an uneven pattern transfer process is repeated, and to provide a fine structure transfer device using this stamper. SOLUTION: This fine...

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Bibliographische Detailangaben
Hauptverfasser:	WASHITANI RYUTA, OGINO MASAHIKO, MIYAUCHI AKIHIRO, MORI KYOICHI, SHIZAWA NORITAKE
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a fine structure transfer stamper which can form a simply constituted and uniform pattern forming layer and hardly breaks even when an uneven pattern transfer process is repeated, and to provide a fine structure transfer device using this stamper. SOLUTION: This fine structure transfer stamper A1 has a space 6 for entrapping a fluid, formed on the opposite side to the surface of a pattern forming thin sheet 3 on which an uneven pattern P is formed. The pattern forming thin sheet 3 is curved to project by the pressure of the fluid entrapped in the space 6, and becomes distorted following the surface of a transfer object 1 when the uneven pattern P is transferred to the transfer object 1. COPYRIGHT: (C)2011,JPO&INPIT