SUBSTRATE SUPPORTING DEVICE AND METHOD OF SUPPORTING SUBSTRATE

PROBLEM TO BE SOLVED: To provide a substrate supporting device for preventing substrates from being supported abnormally because of wear by contact with the substrates and corrosion by chemicals via the substrates. SOLUTION: The substrate supporting device includes a support member including a back support section for supporting the back of a substrate, and a position regulation section that is provided in the support member, surrounds the side of the substrate supported by the back support section, and regulates the position of the substrate. At least one of the back support section and the position regulation section composes a substrate instruction device comprising a base material, and a protective film for preventing at least one of wear and chemical attack while covering the base material. The substrate support device further includes a substrate for supporting, for example, the support member and a drive mechanism for moving the support member to the substrate, and is composed as a substrate carrier. Also, the support member is composed as a temperature adjustment plate, for example, for heating or cooling the substrate. COPYRIGHT: (C)2011,JPO&INPIT