INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide an inspection device for acquiring images the extent of which exceeds the visual field of an imaging part. SOLUTION: This inspection device 1 includes the imaging part 10 moving relatively to an inspecting object to image the inspecting object, and a controller 20 for controlling the drive of the imaging part to acquire an image taken by the imaging part. The controller 20 includes an image processor 30 for performing image processing on a plurality of images acquired by the imaging part 10. The image processor 30 is equipped with an image compositor 31 for preparing a composite image by together pasting the plurality of acquired images. In the inspection device 1, the inspecting object is inspected by using the composite image. COPYRIGHT: (C)2011,JPO&INPIT