Al-Ni ALLOY WIRING MATERIAL AND DEVICE STRUCTURE USING THE SAME

PROBLEM TO BE SOLVED: To provide an Al-Ni alloy wiring material which can directly make contact with a transparent electrode layer of ITO (Indium Tin Oxide) or the like, has superior corrosion resistance against a developer and superior corrosion resistance in the formation of a contact hole, and al...

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Bibliographische Detailangaben
Hauptverfasser:	BAE YANGHO, KIM BYEONG-BEOM, TOKUCHI NARINORI, FUDA RYUMA, YUN PIL SANG, MATSUURA YOSHINORI, KUBOTA TAKASHI, JEONG CHANGOH
Format:	Patent
Sprache:	eng
Schlagworte:	ADVERTISING ALLOYS BASIC ELECTRIC ELEMENTS CABLES CHEMISTRY CONDUCTORS CRYPTOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DISPLAY DISPLAYING EDUCATION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FERROUS OR NON-FERROUS ALLOYS FREQUENCY-CHANGING INSULATORS LABELS OR NAME-PLATES METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEALS SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SEMICONDUCTOR DEVICES SIGNS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an Al-Ni alloy wiring material which can directly make contact with a transparent electrode layer of ITO (Indium Tin Oxide) or the like, has superior corrosion resistance against a developer and superior corrosion resistance in the formation of a contact hole, and allows devices to have constant contact resistance values even though the devices are formed within a surface of a glass substrate having a large area. SOLUTION: In the Al-Ni alloy wiring material containing nickel in aluminum, cerium and boron are contained. When the atomic percentage of nickel for nickel content is defined as Xat%, the atomic percentage of cerium for cerium content is defined as Yat% and the atomic percentage of boron for boron content is defined as Zat%, respective concentrations are within the range of regions satisfying respective inequalities 0.5≤X≤5.0, 0.01≤Y≤1.0 and 0.01≤Z≤1.0. COPYRIGHT: (C)2011,JPO&INPIT