TRAVELING VEHICLE SYSTEM
PROBLEM TO BE SOLVED: To provide a traveling vehicle system attaining space-saving by arranging a substrate cassette storage part above a track and capable of enhancing conveying efficiency of an automated guided truck. SOLUTION: The traveling vehicle system A includes: a substrate treatment device...
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| creator | ISHIBASHI KIEN ONO TOSHITAKA WADA YOSHIYUKI MURAYAMA SUSUMU |
| description | PROBLEM TO BE SOLVED: To provide a traveling vehicle system attaining space-saving by arranging a substrate cassette storage part above a track and capable of enhancing conveying efficiency of an automated guided truck. SOLUTION: The traveling vehicle system A includes: a substrate treatment device for applying storage of the substrate or predetermined treatment; and the automated guided truck AG having horizontal movement parts 8a, 8b for horizontally moving a lifting part 10 for lifting the substrate in a vertical direction in the state that the substrate is stored in a substrate cassette 1 and the substrate cassette 1 toward the substrate treatment device and conveying the substrate cassette 1 along the track L provided toward the substrate treatment device; and a substrate cassette storage part BF1 for retaining/storing the substrate cassette 1 above the track L. COPYRIGHT: (C)2011,JPO&INPIT |
| format | Patent |
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| language | eng |
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| subjects | BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| title | TRAVELING VEHICLE SYSTEM |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-22T14%3A00%3A39IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=ISHIBASHI%20KIEN&rft.date=2010-10-21&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2010235212A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |