TRAVELING VEHICLE SYSTEM

PROBLEM TO BE SOLVED: To provide a traveling vehicle system attaining space-saving by arranging a substrate cassette storage part above a track and capable of enhancing conveying efficiency of an automated guided truck. SOLUTION: The traveling vehicle system A includes: a substrate treatment device for applying storage of the substrate or predetermined treatment; and the automated guided truck AG having horizontal movement parts 8a, 8b for horizontally moving a lifting part 10 for lifting the substrate in a vertical direction in the state that the substrate is stored in a substrate cassette 1 and the substrate cassette 1 toward the substrate treatment device and conveying the substrate cassette 1 along the track L provided toward the substrate treatment device; and a substrate cassette storage part BF1 for retaining/storing the substrate cassette 1 above the track L. COPYRIGHT: (C)2011,JPO&INPIT