SUBSTRATE SUPPORTING DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORTING METHOD, CONTROL PROGRAM OF SUBSTRATE SUPPORTING DEVICE, AND RECORDING MEDIUM

PROBLEM TO BE SOLVED: To assure reliability of pallet holding and operation, and to improve productivity. SOLUTION: A substrate supporting device has a pallet 8 for mounting a substrate 12, a pallet-ends holding mechanism 15 for holding the pallet at its both ends in the radial direction at the vert...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GOSHOKUBO GEN, MAJIMA KAZUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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