SUBSTRATE SUPPORTING DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORTING METHOD, CONTROL PROGRAM OF SUBSTRATE SUPPORTING DEVICE, AND RECORDING MEDIUM

PROBLEM TO BE SOLVED: To assure reliability of pallet holding and operation, and to improve productivity. SOLUTION: A substrate supporting device has a pallet 8 for mounting a substrate 12, a pallet-ends holding mechanism 15 for holding the pallet at its both ends in the radial direction at the vertical situation of the pallet, a pallet-center holding mechanism 13 rotatably holding the pallet center, and a moving mechanism 11 for moving a device body. The pallet-ends holding mechanism holds both ends of the pallet in the radial direction from both ends in the thickness direction. The pallet-ends holding mechanism holds the pallet during moving; and the pallet is held by both the pallet-ends holding mechanism and the pallet-center holding mechanism, when the pallet is passed from the pallet-ends holding mechanism to the pallet-center holding mechanism. The pallet center is rotatably held by the pallet-center holding mechanism on processing the substrate, and the pallet-ends holding mechanism is released from its holding operation. COPYRIGHT: (C)2011,JPO&INPIT