CHAMBER PRESSURE REGULATING DEVICE

PROBLEM TO BE SOLVED: To provide a chamber pressure regulating device which is improved in pressure regulation precision and is shortened in regulation time by reducing the winding of particles. SOLUTION: The chamber pressure regulating device includes a pump 42 for sucking gas in a chamber 22, and configured to introduce pressure regulation gas to a communication tube 52 communicating the chamber 22 with the gas pump 42, and to fix a flow rate by the pump 42, and to control the quantity of introduction of the pressure regulation gas in order to perform pressure regulation in the chamber 22, Accordingly, the chamber pressure regulating device is configured to suck the gas in the chamber 22 without supplying the gas to the chamber 22 so that it is possible to suppress the generation of an air flow in the chamber 22, and to prevent the winding of particles. Also, the chamber pressure regulating device is configured to fix the flow rate by the pump 42 so that it is not necessary to control the rotational frequency of the pump 42. Thus, it is possible to improve the pressure regulation precision, and to shorten the pressure regulation time by regulating the quantity of introduction of the pressure regulation gas. COPYRIGHT: (C)2011,JPO&INPIT