LENS PERFORMANCE INSPECTING APPARATUS
PROBLEM TO BE SOLVED: To provide a lens performance inspecting apparatus which is readily miniaturized and which improves the measurement accuracy. SOLUTION: The lens performance inspection apparatus 1 includes a light source 11; an inspection chart 12 for spatially modulating inspection light fluxe...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a lens performance inspecting apparatus which is readily miniaturized and which improves the measurement accuracy. SOLUTION: The lens performance inspection apparatus 1 includes a light source 11; an inspection chart 12 for spatially modulating inspection light fluxes La, Lb; a half mirror 16 for guiding the spatially-modulated inspection light fluxes La, Lbto a to-be-inspected lens 13, branching the light fluxes transmitted from the object side of the to-be-inspected lens 13 through the to-be-inspected lens 13 from a first light path, and guiding them to a second light path; a reflecting mirror 14, disposed on the object side of the to-be-inspected lens 13 reflecting the inspection light fluxes La, Lbtransmitted through the to-be-inspected lens 13, and making them re-enter the to-be-inspected lens 13; an imaging element 17, disposed on the second light path at an image plane position of the to-be-inspected lens 13 having a conjugate relation between the inspection chart 12 on the first light path; and a calculation section 18 for evaluating the performance of the lens 13 to be inspected, based on an output signal from the imaging element 17. COPYRIGHT: (C)2011,JPO&INPIT |
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