DEVICE AND METHOD OF MEASURING ELECTRONIC COMPONENT

PROBLEM TO BE SOLVED: To provide a technique capable of measuring characteristics of an electronic component, by adjusting the temperature of the electronic component at a target temperature. SOLUTION: The temperature of a support part supporting the electronic component is adjusted so as to be a pr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAKANISHI HIROAKI, ITO MASATOMO, FUKADA AKIHIRO, MASUDA TAKESHI, CHOSOKABE TAKAAKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a technique capable of measuring characteristics of an electronic component, by adjusting the temperature of the electronic component at a target temperature. SOLUTION: The temperature of a support part supporting the electronic component is adjusted so as to be a prescribed first temperature, and the temperature of a holding section holding a probe is adjusted so as to be a prescribed second temperature. The probe is brought into contact with a terminal of the electronic component supported by the support part. COPYRIGHT: (C)2011,JPO&INPIT