DEVICE AND METHOD OF MEASURING ELECTRONIC COMPONENT
PROBLEM TO BE SOLVED: To provide a technique capable of measuring characteristics of an electronic component, by adjusting the temperature of the electronic component at a target temperature. SOLUTION: The temperature of a support part supporting the electronic component is adjusted so as to be a pr...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a technique capable of measuring characteristics of an electronic component, by adjusting the temperature of the electronic component at a target temperature. SOLUTION: The temperature of a support part supporting the electronic component is adjusted so as to be a prescribed first temperature, and the temperature of a holding section holding a probe is adjusted so as to be a prescribed second temperature. The probe is brought into contact with a terminal of the electronic component supported by the support part. COPYRIGHT: (C)2011,JPO&INPIT |
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