ELECTRON BEAM DEVICE

PROBLEM TO BE SOLVED: To provide an electron beam device capable of detecting by dividing detected electrons into each energy band in the electron beam device wherein an electron detector is arranged above an objective lens. SOLUTION: In the electron beam device having an electron beam source 1 for...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KAZUMORI HIROYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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