ELECTRON BEAM DEVICE

PROBLEM TO BE SOLVED: To provide an electron beam device capable of detecting by dividing detected electrons into each energy band in the electron beam device wherein an electron detector is arranged above an objective lens. SOLUTION: In the electron beam device having an electron beam source 1 for emitting an electron beam accelerated with designated acceleration voltage, the objective lens 9 for irradiating the electron beams to a sample 11 by focusing the electron beams emitted from the electron beam source 1, a scanning coil 8 for scanning the focused electron beams on the sample, and an electron detection means 41 for detecting the detected electrons generated the sample in response to scanning of the electron beams and passing through the objective lens, the electron detection means 41 has a plurality of mesh electrodes 3-7 arranged along a track of the electron beam and respectively applying different voltage, and the electron detector 22 for detecting the detected electrons 33-37 sampled from respective gaps of the mutually-opposite mesh electrodes at each gap. COPYRIGHT: (C)2010,JPO&INPIT