MICROMIRROR APPARATUS
PROBLEM TO BE SOLVED: To improve the configuration of a mirror part in a micromirror apparatus having a pivotally moving mirror so that the bend and deformation while reciprocally oscillating is reduced to the minimum by improving the rigidity of the mirror part while suppressing the increase in the...
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| creator | FUSE AKIHIRO |
| description | PROBLEM TO BE SOLVED: To improve the configuration of a mirror part in a micromirror apparatus having a pivotally moving mirror so that the bend and deformation while reciprocally oscillating is reduced to the minimum by improving the rigidity of the mirror part while suppressing the increase in the weight to the minimum which largely affects the moment of inertia of the mirror part. SOLUTION: On an assumption of the micromirror apparatus in which the mirror part is pivotally movably connected to a frame via a torsion bar, the mirror part includes a stress control layer (12) in which layers (12a) having tensile strength and layers (12b) having compressive strength are alternately laminated. COPYRIGHT: (C)2010,JPO&INPIT |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2010210782A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2010210782A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2010210782A3</originalsourceid><addsrcrecordid>eNrjZBD19XQO8vf1DAryD1JwDAhwDHIMCQ3mYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBoYGRoYG5hZGjsZEKQIA7JUfhA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MICROMIRROR APPARATUS</title><source>esp@cenet</source><creator>FUSE AKIHIRO</creator><creatorcontrib>FUSE AKIHIRO</creatorcontrib><description>PROBLEM TO BE SOLVED: To improve the configuration of a mirror part in a micromirror apparatus having a pivotally moving mirror so that the bend and deformation while reciprocally oscillating is reduced to the minimum by improving the rigidity of the mirror part while suppressing the increase in the weight to the minimum which largely affects the moment of inertia of the mirror part. SOLUTION: On an assumption of the micromirror apparatus in which the mirror part is pivotally movably connected to a frame via a torsion bar, the mirror part includes a stress control layer (12) in which layers (12a) having tensile strength and layers (12b) having compressive strength are alternately laminated. COPYRIGHT: (C)2010,JPO&INPIT</description><language>eng</language><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PERFORMING OPERATIONS ; PHYSICS ; TRANSPORTING</subject><creationdate>2010</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20100924&DB=EPODOC&CC=JP&NR=2010210782A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20100924&DB=EPODOC&CC=JP&NR=2010210782A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>FUSE AKIHIRO</creatorcontrib><title>MICROMIRROR APPARATUS</title><description>PROBLEM TO BE SOLVED: To improve the configuration of a mirror part in a micromirror apparatus having a pivotally moving mirror so that the bend and deformation while reciprocally oscillating is reduced to the minimum by improving the rigidity of the mirror part while suppressing the increase in the weight to the minimum which largely affects the moment of inertia of the mirror part. SOLUTION: On an assumption of the micromirror apparatus in which the mirror part is pivotally movably connected to a frame via a torsion bar, the mirror part includes a stress control layer (12) in which layers (12a) having tensile strength and layers (12b) having compressive strength are alternately laminated. COPYRIGHT: (C)2010,JPO&INPIT</description><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2010</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBD19XQO8vf1DAryD1JwDAhwDHIMCQ3mYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBoYGRoYG5hZGjsZEKQIA7JUfhA</recordid><startdate>20100924</startdate><enddate>20100924</enddate><creator>FUSE AKIHIRO</creator><scope>EVB</scope></search><sort><creationdate>20100924</creationdate><title>MICROMIRROR APPARATUS</title><author>FUSE AKIHIRO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2010210782A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2010</creationdate><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>FUSE AKIHIRO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>FUSE AKIHIRO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MICROMIRROR APPARATUS</title><date>2010-09-24</date><risdate>2010</risdate><abstract>PROBLEM TO BE SOLVED: To improve the configuration of a mirror part in a micromirror apparatus having a pivotally moving mirror so that the bend and deformation while reciprocally oscillating is reduced to the minimum by improving the rigidity of the mirror part while suppressing the increase in the weight to the minimum which largely affects the moment of inertia of the mirror part. SOLUTION: On an assumption of the micromirror apparatus in which the mirror part is pivotally movably connected to a frame via a torsion bar, the mirror part includes a stress control layer (12) in which layers (12a) having tensile strength and layers (12b) having compressive strength are alternately laminated. COPYRIGHT: (C)2010,JPO&INPIT</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING |
| title | MICROMIRROR APPARATUS |
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