MICROMIRROR APPARATUS

PROBLEM TO BE SOLVED: To improve the configuration of a mirror part in a micromirror apparatus having a pivotally moving mirror so that the bend and deformation while reciprocally oscillating is reduced to the minimum by improving the rigidity of the mirror part while suppressing the increase in the weight to the minimum which largely affects the moment of inertia of the mirror part. SOLUTION: On an assumption of the micromirror apparatus in which the mirror part is pivotally movably connected to a frame via a torsion bar, the mirror part includes a stress control layer (12) in which layers (12a) having tensile strength and layers (12b) having compressive strength are alternately laminated. COPYRIGHT: (C)2010,JPO&INPIT