SLIT COATER PRELIMINARY DISCHARGE DEVICE

PROBLEM TO BE SOLVED: To provide a slit coater preliminary discharge device capable of washing a rotary roller with a small amount of washing liquid. SOLUTION: The slit coater preliminary discharge device includes: the rotary roller 12 which is arranged close to the distal end of a nozzle 9 at a pre...

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Bibliographische Detailangaben
Hauptverfasser: SUEMITSU TOSHIYUKI, NAKAMURA YOSHIHIRO, KURUMAYA KAZUMICHI, YOSHINAGA MITSUHIRO, MAEJIMA SATOSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a slit coater preliminary discharge device capable of washing a rotary roller with a small amount of washing liquid. SOLUTION: The slit coater preliminary discharge device includes: the rotary roller 12 which is arranged close to the distal end of a nozzle 9 at a preliminary discharge position and is rotated to attach the coating liquid of the nozzle 9 on the peripheral surface and receive it; a pan 11 which is arranged at a position for receiving the coating liquid dropped from the peripheral surface of the rotary roller 12; first squeegee 13 which rakes off the coating liquid from the rotary roller 12 on the lower side of the rotating direction of the rotary roller 12 in the view from the nozzle 9 at the preliminary discharge position; and a washing liquid dripping nozzle 15 which drips the washing liquid 15a on the upper side of the rotating direction of the rotary roller 12 in the view from the nozzle 9 at the preliminary discharge position. COPYRIGHT: (C)2010,JPO&INPIT