SPINNER CLEANING DEVICE

PROBLEM TO BE SOLVED: To provide a spinner cleaning device capable of cleaning the entire surface of an object to be cleaned efficiently in a short time without requiring a larger flow rate nor higher fluid pressure. SOLUTION: The spinner cleaning device includes a spinner table which has a holding surface where the object to be cleaned is held and can rotate, and a cleaning fluid supply means of supplying a cleaning fluid to the object to be cleaned which is held on the spinner table. The cleaning fluid supply means includes an arm, a cleaning fluid injection nozzle disposed movably at the tip of the arm to inject the cleaning fluid toward the holding surface, piping for supplying the cleaning fluid to the cleaning fluid injection nozzle, a swing means of swinging the arm, relatively to the object to be cleaned which is held on the spinner table and rotated at a predetermined speed, so that the tip of the arm passes the center of rotation of the spinner table, a first moving means of moving the cleaning fluid injection nozzle in a first direction on a plane parallel with the holding surface, and a second moving means of moving the cleaning fluid injection nozzle in a second direction orthogonal to the first direction on the plane parallel with the holding surface. COPYRIGHT: (C)2010,JPO&INPIT