METHOD OF MANUFACTURING FIELD EMISSION ELECTRON SOURCE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a field emission electron source having an acicular structure on the surface. SOLUTION: The field emission electron source 1 is manufactured by plasma-treating a field emission electron source material 4 consisting of a graphite interlayer compound equipped with heavy metal atoms intercalated between layers. The field emission electron source 1 is manufactured by supporting a field emission electron source material 4 made of a graphite single body with a material holder 6 consisting of a graphite interlayer compound equipped with heavy metal atoms intercalated between layers, and subjecting it to plasma treatment. The heavy metal may be one or more heavy metal selected from antimony, copper, nickel, cobalt, iron, platinum, titanium, vanadium, chromium, manganese, yttrium, niobium, molybdenum, palladium, silver, gold, tin, tungsten, and rhenium. COPYRIGHT: (C)2010,JPO&INPIT