FOLDED LONGITUDINAL TORSIONAL HINGE FOR GIMBALED MEMS MIRROR HINGE

FOLDED LONGITUDINAL TORSIONAL HINGE FOR GIMBALED MEMS MIRROR HINGE

PROBLEM TO BE SOLVED: To provide a hinge used with a dual axis micromirror such as an MEMS array and a parallel plate electrostatic operation, that allows for a compliant torsional rotation while simultaneously restricting net vertical and horizontal displacement. SOLUTION: A circular mirror (12) is...

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Bibliographische Detailangaben
Hauptverfasser: STAKER BRYAN P, BANYAI WILLIAM C
Format: Patent
Sprache:eng
Schlagworte:
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a hinge used with a dual axis micromirror such as an MEMS array and a parallel plate electrostatic operation, that allows for a compliant torsional rotation while simultaneously restricting net vertical and horizontal displacement. SOLUTION: A circular mirror (12) is connected to a gimbal (44) at opposing, but at locations (36) and (37) deviated from the center axis with compound longitudinal hinges (40) and (42). COPYRIGHT: (C)2010,JPO&INPIT