METAL SUBSTRATE, DEVICE FOR FORMING THIN FILM ON METAL SUBSTRATE AND SOLAR CELL USING METAL SUBSTRATE

PROBLEM TO BE SOLVED: To solve the problem that, there is no method for forming a silicon crystal film at a low temperature at which metal impurities is not dispersed on a metal substrate, and heat treatment for a passivation (protective) film and a transparent electrode film should be executed while keeping the substrate at a low temperature. SOLUTION: Silane is thermally decomposed with gas having a temperature relatively higher than that of the substrate, thereby growing a silicon crystal layer to form a pn-junction on the metal substrate on which a peaked cone held on a low-temperature supporting plate is formed. In this way, a metal plate for inexpensively manufacturing a thin-film crystal solar cell capable of securing a long optical path can be manufactured. As the silane, monosilane (SiH4), disilane (Si2H6) or trisilane (Si3H8) can be used. As a metal plate material for forming the cone, aluminum or stainless may be used. Thus, a manufacturing apparatus for manufacturing a solar cell on the metal substrate can be configured. COPYRIGHT: (C)2010,JPO&INPIT