PHOTOMASK CASE

PROBLEM TO BE SOLVED: To provide a photomask case capable of restraining dust or the like from sticking to a photomask during position determining work and restraining the occurrence of backlash during transportation. SOLUTION: The photomask case includes: a case body having an abutting part that ab...

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Bibliographische Detailangaben
Hauptverfasser:	TAKEUCHI MASAHIRO, WATABE YOSHIHIRO, HIRAI KENSAKU, INOUE MASASHI
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a photomask case capable of restraining dust or the like from sticking to a photomask during position determining work and restraining the occurrence of backlash during transportation. SOLUTION: The photomask case includes: a case body having an abutting part that abuts on one side in the vertical direction of the enclosed photomask, and a holding means for determining the lateral and vertical position of the photomask; and a cover body for pressing the photomask to the case body side in the thickness direction to fix the photomask. The holding means includes a lateral holding means 8 and a vertical holding means 11 for determining the lateral and vertical position of the photomask, and an operating part 8C of the lateral holding means 8 and an operating part 11C of the lateral holding means 11 are arranged in outside positions off both right and left ends of the photomask. COPYRIGHT: (C)2010,JPO&INPIT