DISPLACEMENT DETECTING ELEMENT, MICRO ELECTROMECHANICAL APPARATUS AND ELECTRONIC DEVICE

PROBLEM TO BE SOLVED: To provide a displacement detecting element for improving a noise removal performance, simplifying a constitution, and accurately detecting a displacement. SOLUTION: The displacement detecting element includes: a pair of structures 31, 32 whose relative position is displaced; t...

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Hauptverfasser:	FUKUMOTO YASUSHI, MATSUHISA KAZUHIRO, MATSUMOTO YUKI, SAMEJIMA HISANAO
Format:	Patent
Sprache:	eng
Schlagworte:	GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a displacement detecting element for improving a noise removal performance, simplifying a constitution, and accurately detecting a displacement. SOLUTION: The displacement detecting element includes: a pair of structures 31, 32 whose relative position is displaced; two electrodes 33 juxtaposed in one of a pair of the structures 31, 32; one electrode 34 disposed in the other of a pair of the structures 31, 32 so as to face two electrodes 33 through a gap; and a detecting circuit section 35 for differentially detecting an electrostatic capacitance between two electrodes 33 and one electrode 34 by applying voltages having different phases or polarities to two electrodes 33. COPYRIGHT: (C)2010,JPO&INPIT