METHOD FOR PRODUCING MICROSTRUCTURE, ASSEMBLY THEREOF, MICROSTRUCTURE, REFORMER, APPARATUS FOR GENERATING MICROPLASMA, SENSING DEVICE FOR DETECTING GAS, ACTUATOR, AND PRESSURE SENSING DEVICE

PROBLEM TO BE SOLVED: To provide a method for producing a microstructure, with which the homogeneous microstructure having a desired shape can be formed. SOLUTION: A base material 1 having a plurality of projecting parts 5 on the surface thereof is arranged such that the direction 4 of each projecti...

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Hauptverfasser:	ISHIWATARI YUTAKA, WADA KUNIHIKO, FUSE TOSHIAKI, SUGA TAKEO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for producing a microstructure, with which the homogeneous microstructure having a desired shape can be formed. SOLUTION: A base material 1 having a plurality of projecting parts 5 on the surface thereof is arranged such that the direction 4 of each projecting part 5 on the surface of the base material 1, which is determined by the tip of each projecting part, is biased from an opposing direction with respect to the incident direction of a particle 3 to be deposited by evaporation, and a material to be deposited by evaporation is grown. As a result, the structure of the material to be deposited by evaporation is grown from the tip of each projecting part 5 to form an assembly of physically independent microstructures 2 in which individual structures are isolated from one another by gaps. COPYRIGHT: (C)2010,JPO&INPIT