APPARATUS FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DEVICE, FILM-FORMING APPARATUS AND SHADOW-MASK-REPLACING UNIT

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an organic electroluminescence device, a film-forming apparatus, a shadow-mask-replacing unit or a method for replacing the shadow mask, which can miniaturize a transfer chamber and provides high productivity or high availability factor...

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Hauptverfasser:	YUMIBA KENJI, NIRASAWA NOBUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an organic electroluminescence device, a film-forming apparatus, a shadow-mask-replacing unit or a method for replacing the shadow mask, which can miniaturize a transfer chamber and provides high productivity or high availability factor. SOLUTION: This film-forming apparatus includes a vacuum chamber that has a vacuum vapor-deposition chamber therein for aligning a shadow mask with a substrate and vapor-depositing a vapor deposition material in an evaporation source on the substrate, and has a shadow-mask-replacing chamber provided therein which is adjacent to the vacuum vapor-deposition chamber and an atmospheric part and has a means for carrying the shadow mask into or out from the vacuum vapor-deposition chamber through the two adjacent parts. COPYRIGHT: (C)2010,JPO&INPIT