METHOD AND DEVICE FOR INSPECTING STATE OF LASER BEAM AND METHOD OF MANUFACTURING SOLAR PANEL
PROBLEM TO BE SOLVED: To inspect the state of the optical axis of a laser beam and the output state of the laser beam during machining. SOLUTION: In this method, at least one of the deviation of the optical axis, pulse width, pulse height (laser power) and pulse omission of the laser beam is inspect...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To inspect the state of the optical axis of a laser beam and the output state of the laser beam during machining. SOLUTION: In this method, at least one of the deviation of the optical axis, pulse width, pulse height (laser power) and pulse omission of the laser beam is inspected to check the state of the laser beam during laser beam machining. An extracting means is arranged on the optical path of the laser beam to extract a part of the laser beam by branching; the laser beam extracted by branching is received by a beam receiving means and inspection is performed on the basis of a beam receiving signal. COPYRIGHT: (C)2010,JPO&INPIT |
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