PULSE TRANSMISSION LINE, PULSE SUPPLYING APPARATUS, AND PLASMA PROCESSING DEVICE

PROBLEM TO BE SOLVED: To provide a pulse transmission line which transmits electrical pulses with high efficiency and safely. SOLUTION: The power source side end of an inner conductor 118 of a first coaxial cable 116 is connected to a first input terminal 106 of an input port 104, the power source side end of an outer conductor 120 is opened. The load side end of the inner conductor 118 is connected to a first output terminal 112 of an output port 110 via a first winding 138 of a common mode reactor 136, the load side of the outer conductor 120 is connected to ground via a first resistor 132. The power source side end of an inner conductor 124 of a second coaxial cable 122 is connected to a second input terminal 108 of the input port 104, the power source side end of an outer conductor 126 is opened. The load side end of the inner conductor 124 is connected to a second output terminal 114 of the output port 110 via a second winding 140 of the common mode reactor 136, the load side end of the outer conductor 126 is connected to ground via a second resistor 134. COPYRIGHT: (C)2010,JPO&INPIT