THIN FILM TRANSISTOR ARRAY SUBSTRATE, REFLECTION TYPE LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a method of manufacturing a reflection type liquid crystal display device achieving high reliability while attaining reduction of a manufacturing process and enhancement of yield. SOLUTION: The method of manufacturing the reflection type liquid crystal display device includes a step of forming an irregular pattern on a surface of an organic flattening film 5 and a first organic film pattern 5B having a level difference structure in the thickness direction by adjusting irradiation intensity according to a first region A1 where an opening is formed in at least an interlayer dielectric 4, a second region A2 where the interlayer dielectric 4 is exposed and a third region A3 where the irregular pattern is formed on the surface of the organic flattening film 5, s step of forming the opening in the interlayer dielectric 4 in the first region A1, a step of forming a second organic film pattern 5C by reducing film thickness of the organic flattening film 5 thereby removing the organic flattening film 5 of the second region A2 and a step of forming a transparent conductive thin film 31 and a reflection conductive thin film 32 by a halftone exposure technique or the like. At least a terminal and peripheral regions 53 and 54 thereof are included as the second region. COPYRIGHT: (C)2010,JPO&INPIT