SPINNER CLEANING DEVICE

PROBLEM TO BE SOLVED: To provide a spinner cleaning device that eliminates the need for increasing a fluid amount and a fluid pressure and is capable of cleaning all over the surface of an object to be cleaned in a short time period efficiently. SOLUTION: A spinner cleaning device includes a rotatable spinner table having a supporting face to support the object to be cleaned, and a cleaning fluid supply means that supplies a cleaning fluid to the object to be cleaned supported by the spinner table. The cleaning fluid supply means includes an arm connected with a cleaning fluid supply source, a cleaning fluid spray nozzle that is disposed at the tip of the arm and sprays the cleaning fluid toward the supporting face, and an oscillating means that oscillates the arm so that the tip of the arm passes through a rotation center of the spinner table against the object to be cleaned that is supported by the spinner table and rotated at a predetermined speed. The cleaning fluid spray nozzle is disposed at the tip of the arm via a rotary joint and rotatable about the rotary joint in a plane parallel to the supporting face. COPYRIGHT: (C)2010,JPO&INPIT