TWO-DIMENSIONAL SQUARE LATTICE STRUCTURE AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a two-dimensional square lattice structure that prevents a crystal from being damaged and improves its characteristics, and to provide a method of manufacturing the same. SOLUTION: The two-dimensional square lattice structure 10a includes a first part 11 comprising A...

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Hauptverfasser: YAMAMOTO YOSHIYUKI, NAKAHATA HIDEAKI, SATO KAZUNARI, MIYANAGA TOMOMASA, AKAHA YOSHIHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a two-dimensional square lattice structure that prevents a crystal from being damaged and improves its characteristics, and to provide a method of manufacturing the same. SOLUTION: The two-dimensional square lattice structure 10a includes a first part 11 comprising AlxGa(1-x)N(0