METHOD FOR DEPOSITING THIN FILM

PROBLEM TO BE SOLVED: To provide a method for depositing a thin film capable of performing film-deposition by highly efficiently generating stable plasma. SOLUTION: In the method for depositing the thin film, a thin film depositing device including a vacuum vessel 11 maintaining the inner part there...

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Bibliographische Detailangaben
Hauptverfasser:	SAKURAI TAKESHI, AMANO NAOJI, CHIBA KOKI, KYO YUSHO, SONG YIZHOU
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for depositing a thin film capable of performing film-deposition by highly efficiently generating stable plasma. SOLUTION: In the method for depositing the thin film, a thin film depositing device including a vacuum vessel 11 maintaining the inner part thereof in a vacuum and a plasma generating means generating plasma in an antenna housing room 80A connected to the vacuum vessel is used. The method for manufacturing the thin film includes: a pressure reducing step for evacuating the inner part of the vacuum vessel in a vacuum state and reducing pressure of the inner part of the antenna housing room in a vacuum state of 10-3Pa or lower to be lower than that of the vacuum vessel; and a plasma treatment step for generating plasma in the inner part of the vacuum vessel by applying a high frequency voltage to an antenna 85a and subjecting the thin film formed in the vacuum vessel to plasma treatment. COPYRIGHT: (C)2010,JPO&INPIT