METHOD AND PROBE FOR MEASURING ELECTRIC PROPERTY

PROBLEM TO BE SOLVED: To precisely evaluate the electric resistance of a spherical conductive material the diameter of which is 1 mm or below. SOLUTION: An innovated probe structure is provided which evaluates the electric resistance of the spherical conductive material by using a four-terminal method. Specifically, a current probe for sandwiching the spherical conductive material between two counter electrodes so as to contact them and bringing constant current to flow therethrough, and a voltage probe for measuring a potential difference between two points on the surface of the spherical conductive material, are disposed independently, thereby enabling a precise evaluation. COPYRIGHT: (C)2010,JPO&INPIT