METHOD FOR PRODUCING MULTILAYER FILM, AND DEVICE FOR CARRYING OUT THE METHOD

PROBLEM TO BE SOLVED: To provide a method and a device for producing a multilayer film with less optical loss. SOLUTION: The method for producing a multilayer film comprises the following steps of: performing the deposition of a second layer having a reactive component on a first layer on at least one substrate relatively displaceable to a coating device or reaction device; and performing, by the reaction device, the change of structure of at least one layer and/or a stoichiometric ratio. In order to reduce the optical loss of the multilayer film to below a prescribed value, an interface having the thickness d1and having a value for the deficit of the reactive component DEF that is less than a value DEF1is created in the zone of the second layer adjoining the first layer. The value of instantaneous thickness d (t) of the second layer is calculated advantageously during deposition of the second layer, and the deposition of the second layer having the value of the deficit DEF of the reactive component larger than that of DEF1is performed at a time when d (t) becomes larger than d1. COPYRIGHT: (C)2010,JPO&INPIT