DEVICE-MANUFACTURING APPARATUS, CONTROL METHOD OF THE DEVICE-MANUFACTURING APPARATUS, AND DEVICE-MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a device-manufacturing apparatus with improved operability for repairing, maintenance and the like. SOLUTION: The device-manufacturing apparatus 51 can be operated by remote terminals 57, 58 and 59 via a circuit 60, and includes: a setting section (controller 55) tha...

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Bibliographische Detailangaben
1. Verfasser:	KAWADA DAIZO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a device-manufacturing apparatus with improved operability for repairing, maintenance and the like. SOLUTION: The device-manufacturing apparatus 51 can be operated by remote terminals 57, 58 and 59 via a circuit 60, and includes: a setting section (controller 55) that sets exclusive usage state, where the device-manufacturing apparatus 51 can be operated exclusively, based on the request from any of the terminals including a console terminal 52, and the remote terminals 57, 58 and 59; and a control section (controller 55) that switches the exclusive use state from a predetermined terminal to the console terminal 52, when the interlock function of the device-manufacturing apparatus 51 is activated. COPYRIGHT: (C)2010,JPO&INPIT