SHAPE MEASURING DEVICE

PROBLEM TO BE SOLVED: To improve an SN ratio of a measurement result of a specimen without lowering work efficiency. SOLUTION: In this shape measuring device 11, measuring light is emitted from a light source 26 to irradiate the specimen 12, and the measuring light from the specimen 12 is received by a light receiving part 27, to thereby measure the shape of the specimen 12. An umbrella-shaped shielding part 28 is provided in an optical sensor part 25 to cover its outer peripheral part, and the shielding part 28 shields disturbance light so that the disturbance light irradiated to the specimen 12 and entering the light receiving part 27 are not irradiated to the specimen 12. Hereby, the disturbance light is prevented from entering the light receiving part 27, and the SN ratio of an electric signal acquired by receiving the measuring light by the light receiving part 27 can be improved. Further, such a state does not occur that a measurer cannot view the specimen 12 because of hindrance caused by the shielding part 28, to thereby prevent decline of work efficiency. This invention is applicable to the shape measuring device. COPYRIGHT: (C)2010,JPO&INPIT