MASK CLEANING DEVICE FOR ORGANIC EL, MANUFACTURING DEVICE OF ORGANIC EL DISPLAY, ORGANIC EL DISPLAY, AND MASK CLEANING METHOD FOR ORGANIC EL

PROBLEM TO BE SOLVED: To prevent re-adhesion of a separated product dispersed from a substrate to an organic EL mask while removing the vapor deposition object in a complete non-contact state with the substrate, when cleaning is performed for removing the vapor deposition object adhered to the organ...

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Bibliographische Detailangaben
Hauptverfasser:	YUMIBA KENJI, SUZUKI KURAZO, KATAGIRI KENJI, IZAKI MAKOTO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To prevent re-adhesion of a separated product dispersed from a substrate to an organic EL mask while removing the vapor deposition object in a complete non-contact state with the substrate, when cleaning is performed for removing the vapor deposition object adhered to the organic EL mask. SOLUTION: This is a mask cleaning device for organic EL to remove a vapor deposition substance VM adhered to an organic EL mask 2, and is provided with a mask holding means 3 to hold the organic EL mask 2 in a state of standing the organic EL mask 2 and a laser cleaning means 4 which irradiates laser beams from a direction orthogonal to the surface of the organic EL mask 2 and crushes the vapor deposition substance VM, and scatters the separated product from the organic EL mask. Since the organic EL mask 2 is held in standing state, and the separated product is scattered from the organic EL mask 2 in a separation direction to fall freely, the separated product is not re-adhered to the organic EL mask 2. COPYRIGHT: (C)2010,JPO&INPIT